作者DOSHINE (大只佬)
看板ChemEng
标题[问题] 请问有关coating AFM探针
时间Wed Mar 10 23:18:51 2010
To support the high currents required for STT switching, commercial silicon
probes with a nominal spring constant of 2.8 N/m were coated with a 200 nm Pt
film by sputtering, which increases the tip radius to nominally 100 nm.
想请问有人懂这段英文所说的探针溅镀是如何去做的吗?
是指用溅镀机直接溅镀在探针上吗?
有人真的这样做过吗?
还是有其他方法? 麻烦提供论文之类的参考一下
还请不吝赐教 谢谢!!
--
※ 发信站: 批踢踢实业坊(ptt.cc)
◆ From: 140.125.169.45
1F：推 cougarchen:磁控溅镀作的 03/15 23:26
2F：→ cougarchen:很多方法都商业化了，方法很少 03/15 23:27
3F：→ DOSHINE:感谢楼上的回答!! 03/16 13:24